A Study on Heater Design for Crystal Growth of GaAs Ingot Using Growth Temperature Simulation
نویسندگان
چکیده
In this work, a study on large-diameter GaAs ingot growth is presented. Optimized temperature control technology developed. Horizontal and vertical application technologies with optimum conditions are investigated. The design result verified through thermal analysis. addition, polishing process for substrates Simulation data were used to carry out experiments determine the conditions. As of defect analysis, final manufacturing found have excellent thickness variations. This presents validity developed in work.
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ژورنال
عنوان ژورنال: Applied sciences
سال: 2023
ISSN: ['2076-3417']
DOI: https://doi.org/10.3390/app13137892